Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416647 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Joe Stevens, Roy Edwards, Michael Sugarman, Mark Denome | 2002-07-09 |