Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474712 | Gripper for supporting substrate in a vertical orientation | Boris Govzman, Manoocher Birang, Anwar Husain | 2002-11-05 |
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Vincent E. Burkhart, Steven V. Sansoni, Anthony Chih-Tung Chan | 2002-10-22 |
| 6423636 | Process sequence for improved seed layer productivity and achieving 3mm edge exclusion for a copper metalization process on semiconductor wafer | Yezdi Dordi | 2002-07-23 |
| 6416647 | Electro-chemical deposition cell for face-up processing of single semiconductor substrates | Yezdi Dordi, Joe Stevens, Roy Edwards, Bob Lowrance, Mark Denome | 2002-07-09 |
| 6406359 | Apparatus for transferring semiconductor substrates using an input module | Manoocher Birang, Brian J. Brown, Anwar Husain | 2002-06-18 |