Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474712 | Gripper for supporting substrate in a vertical orientation | Boris Govzman, Manoocher Birang, Michael Sugarman | 2002-11-05 |
| 6406359 | Apparatus for transferring semiconductor substrates using an input module | Manoocher Birang, Brian J. Brown, Michael Sugarman | 2002-06-18 |