Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Vincent E. Burkhart, Michael Sugarman, Anthony Chih-Tung Chan | 2002-10-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Vincent E. Burkhart, Michael Sugarman, Anthony Chih-Tung Chan | 2002-10-22 |