Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488820 | Method and apparatus for reducing migration of conductive material on a component | — | 2002-12-03 |
| 6469283 | Method and apparatus for reducing thermal gradients within a substrate support | Steven V. Sansoni, Michael Sugarman, Anthony Chih-Tung Chan | 2002-10-22 |
| 6377060 | Method and apparatus for wafer detection | Deepak Manaoharlal | 2002-04-23 |