Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458684 | Single step process for blanket-selective CVD aluminum deposition | Ted Guo, Liang-Yuh Chen, Roderick C. Mosely | 2002-10-01 |
| 6391771 | Integrated circuit interconnect lines having sidewall layers | Suketu Arun Parikh | 2002-05-21 |