Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433314 | Direct temperature control for a component of a substrate processing chamber | Anish Tolia, Nitin Khurana | 2002-08-13 |
| 6423201 | Method of improving the adhesion of copper | — | 2002-07-23 |
| 6375753 | Method and apparatus for removing processing liquid from a processing liquid delivery line | Anish Tolia, Michael S. Jackson | 2002-04-23 |
| 6345642 | Method and apparatus for removing processing liquid from a processing liquid path | Ted G. Yoshidome, Nitin Khurana, Anish Tolia | 2002-02-12 |