Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6433314 | Direct temperature control for a component of a substrate processing chamber | Tushar Mandrekar, Nitin Khurana | 2002-08-13 |
| 6413383 | Method for igniting a plasma in a sputter reactor | Tony P. Chiang, Yu D. Cong, Peijun Ding, Jianming Fu, Howard H. Tang | 2002-07-02 |
| 6398929 | Plasma reactor and shields generating self-ionized plasma for sputtering | Tony P. Chiang, Yu D. Cong, Peijun Ding, Jianming Fu, Howard H. Tang | 2002-06-04 |
| 6375753 | Method and apparatus for removing processing liquid from a processing liquid delivery line | Tushar Mandrekar, Michael S. Jackson | 2002-04-23 |
| 6345642 | Method and apparatus for removing processing liquid from a processing liquid path | Ted G. Yoshidome, Tushar Mandrekar, Nitin Khurana | 2002-02-12 |