Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Brian Lue, Dan Maydan, Robert Steger +8 more | 2002-07-02 |
| 6405423 | Method for producing vacuum processing chambers | — | 2002-06-18 |