Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490144 | Support for supporting a substrate in a process chamber | Kadthala Ramaya Narendrnath, Dennis S. Grimard, Surinder Bedi, Ananda H. Kumar, Shamouil Shamouilian | 2002-12-03 |
| 6390904 | Retainers and non-abrasive liners used in chemical mechanical polishing | Allan Gleason, Manoocher Birang, John Prince, Mohsen Salek | 2002-05-21 |