Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443823 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Robert D. Tolles, Tsungan Cheng | 2002-09-03 |
| 6390904 | Retainers and non-abrasive liners used in chemical mechanical polishing | Allan Gleason, Manoocher Birang, Mohsen Salek, Syed H. Askari | 2002-05-21 |
| 6388002 | Dispersed resins for use in coating compositions | Gary Baker | 2002-05-14 |