Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443823 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Robert D. Tolles, John Prince | 2002-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443823 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Robert D. Tolles, John Prince | 2002-09-03 |