Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465051 | Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling | Turgut Sahin, Fred C. Redeker, Shijian Li, Timothy Dyer, Derek R. Witty | 2002-10-15 |
| 6364995 | Dome-shaped inductive coupling wall having a plurality of radii for an inductively coupled plasma reactor | Kevin Fairbairn | 2002-04-02 |