Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6371836 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, Robert D. Tolles, Doyle E. Bennett, Madhavi R. Chandrachood | 2002-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6371836 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, Robert D. Tolles, Doyle E. Bennett, Madhavi R. Chandrachood | 2002-04-16 |