Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399501 | Method and apparatus for detecting polishing endpoint with optical monitoring | Manoocher Birang, Boguslaw A. Swedek | 2002-06-04 |
NJ
Nils Johansson
Overall (2002): #146,636 of 266,432Top 60%
1
Patents 2002