Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6558508 | Processing apparatus having dielectric plates linked together by electrostatic force | — | 2003-05-06 |
| 6501082 | Plasma deposition apparatus and method with controller | Toshio Goto, Masaru Hori, Masafumi Ito, Nobuo Ishii | 2002-12-31 |
| 6470824 | Semiconductor manufacturing apparatus | Shigemi Murakawa, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-10-29 |
| 6452400 | Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same | Yoshinobu Kawai, Yoko Ueda, Nobuo Ishii | 2002-09-17 |
| 6431114 | Method and apparatus for plasma processing | Issei Imahashi, Nobuo Ishii, Yoshinobu Kawai, Yoko Ueda | 2002-08-13 |
| 6432208 | Plasma processing apparatus | Katsuhiko Iwabuchi, Ryo Kuwajima, Ryusuke Ushikoshi, Naohito Yamada, Tetsuya Kawajiri | 2002-08-13 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Shigemi Murakawa, Mitsuhiro Yuasa, Toshiaki Hongoh | 2002-06-04 |
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Toshiaki Hongoh, Tetsu Oosawa, Mitsuhiro Yuasa | 2002-03-19 |
| 6284674 | Plasma processing device and a method of plasma process | Makoto Toraguchi | 2001-09-04 |
| 6161498 | Plasma processing device and a method of plasma process | Makoto Toraguchi | 2000-12-19 |
| 6066568 | Plasma treatment method and system | Yoshinobu Kawai, Yoko Ueda, Nobuo Ishii, Hideaki Amano | 2000-05-23 |
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Yoichi Deguchi, Shiro Koyama, Kenji Ishikawa | 1997-09-09 |
| 5665166 | Plasma processing apparatus | Youichi Deguchi, Yoichi Ueda, Mitsuaki Komino | 1997-09-09 |
| 5542559 | Plasma treatment apparatus | Tsuyoshi Suzuki, Junichi Arami, Yoichi Deguchi | 1996-08-06 |
| 5494522 | Plasma process system and method | Shuji Moriya, Masahiro Ogasawara, Jun Yashiro, Yoshifumi Tahara, Susumu Tanaka | 1996-02-27 |
| 5478429 | Plasma process apparatus | Mitsuaki Komino, Yoichi Ueda, Youichi Deguchi | 1995-12-26 |
| 4407999 | Water repellent adhesive composition for wooden material | Takeshi Fushiki, Tohru Tagawa | 1983-10-04 |