Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6284674 | Plasma processing device and a method of plasma process | Satoru Kawakami | 2001-09-04 |
| 6277248 | Ozone production facilities and method of their operation | Hisamichi Ishioka, Sanae Suzuki | 2001-08-21 |
| 6161498 | Plasma processing device and a method of plasma process | Satoru Kawakami | 2000-12-19 |
| 6027701 | Ozone generator | Hisamichi Ishioka, Takaya Nishikawa, Hideaki Nishii | 2000-02-22 |
| 6027700 | Ozone production facilities and method of their operation | Hisamichi Ishioka, Sanae Suzuki | 2000-02-22 |
| 5948485 | Plasma deposition method and an apparatus therefor | Hideaki Amano, Genichi Katagiri | 1999-09-07 |
| 5160152 | Electrostatic chuck | Genichi Katagiri, Yasushi Sakakibara | 1992-11-03 |