Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5948485 | Plasma deposition method and an apparatus therefor | Hideaki Amano, Makoto Toraguchi | 1999-09-07 |
| 5160152 | Electrostatic chuck | Makoto Toraguchi, Yasushi Sakakibara | 1992-11-03 |