Issued Patents All Time
Showing 101–125 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8431035 | Plasma processing apparatus and method | Manabu Iwata, Yohei Yamazawa | 2013-04-30 |
| 8425791 | In-chamber member temperature control method, in-chamber member, substrate mounting table and plasma processing apparatus including same | Manabu Iwata, Tatsuo Matsudo | 2013-04-23 |
| 8426317 | Plasma processing apparatus and plasma processing method | — | 2013-04-23 |
| 8404137 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto | 2013-03-26 |
| 8342121 | Plasma processing apparatus | — | 2013-01-01 |
| 8343306 | Plasma processing apparatus and method of plasma distribution correction | Satoshi Tanaka, Manabu Iwata, Naoki Matsumoto, Toru Ito | 2013-01-01 |
| 8298371 | Plasma processing apparatus | Naoki Matsumoto, Satoshi Tanaka, Toru Ito | 2012-10-30 |
| 8293068 | Plasma processing apparatus | Shinji Himori | 2012-10-23 |
| 8251011 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Fumihiko Higuchi, Akitaka Shimizu, Asao Yamashita +5 more | 2012-08-28 |
| 8182142 | Temperature measuring apparatus and temperature measuring method | Jun Abe, Tatsuo Matsudo | 2012-05-22 |
| 8178444 | Substrate processing method and substrate processing apparatus | Taichi Hirano, Masanobu Honda, Shinji Himori | 2012-05-15 |
| 8164033 | Stage, substrate processing apparatus, plasma processing apparatus, control method for stage, control method for plasma processing apparatus, and storage media | Tomohiro Suzuki | 2012-04-24 |
| 8144332 | Temperature measurement apparatus and method | Jun Abe, Tatsuo Matsudo | 2012-03-27 |
| 8138445 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Yoshinobu Hayakawa, Hidetoshi Hanaoka, Manabu Iwata, Satoshi Tanaka | 2012-03-20 |
| 8137471 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +6 more | 2012-03-20 |
| 8124539 | Plasma processing apparatus, focus ring, and susceptor | Shosuke Endoh, Noriyuki Iwabuchi, Shigeaki Kato, Tomoya Okubo, Jun Hirose +2 more | 2012-02-28 |
| 8034213 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Yoshinobu Hayakawa, Hidetoshi Hanaoka, Noriaki Kodama, Manabu Iwata +1 more | 2011-10-11 |
| 7993489 | Capacitive coupling plasma processing apparatus and method for using the same | Naoki Matsumoto, Akira Koshiishi | 2011-08-09 |
| 7988816 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +11 more | 2011-08-02 |
| 7956310 | Stage, substrate processing apparatus, plasma processing apparatus, control method for stage, control method for plasma processing apparatus, and storage media | Tomohiro Suzuki | 2011-06-07 |
| 7951262 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +10 more | 2011-05-31 |
| 7952717 | Temperature measuring apparatus and temperature measuring method | Jun Abe, Tatsuo Matsudo | 2011-05-31 |
| 7829463 | Plasma processing method and plasma processing apparatus | Naoki Matsumoto, Manabu Iwata, Satoshi Tanaka | 2010-11-09 |
| 7740737 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +6 more | 2010-06-22 |
| 7692916 | Capacitive coupling plasma processing apparatus and method | Naoki Matsumoto, Hideaki Tanaka, Hisashi Fujiwara, Fumiaki Koiwa, Toshiyuki Kobayashi +2 more | 2010-04-06 |