Issued Patents All Time
Showing 126–150 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582182 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Naoki Matsumoto, Yohei Yamazawa, Tatsuo Matsudo, Sumie Segawa | 2009-09-01 |
| 7542148 | Method for measuring physical quantity of measurement object in substrate processing apparatus and storage medium storing program for implementing the method | Tomohiro Suzuki | 2009-06-02 |
| 7532322 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Tatsuo Matsudo, Sumie Segawa | 2009-05-12 |
| 7527016 | Plasma processing apparatus | Yohei Yamazawa, Manabu Iwata, Fumihiko Higuchi, Akitaka Shimizu, Asao Yamashita +5 more | 2009-05-05 |
| 7462293 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Naoki Matsumoto, Yohei Yamazawa | 2008-12-09 |
| 7446881 | System, apparatus, and method for determining temperature/thickness of an object using light interference measurements | Tomohiro Suzuki | 2008-11-04 |
| 7416330 | Method and apparatus for measuring temperature of substrate | Masafumi Ito, Yasuyuki Okamura, Tatsuo Shiina, Nobuo Ishii, Tomohiro Suzuki | 2008-08-26 |
| 7415940 | Plasma processor | Yohei Yamazawa | 2008-08-26 |
| 7379189 | Temperature/thickness measuring apparatus, temperature/thickness measuring method, temperature/thickness measuring system, control system and control method | Tomohiro Suzuki | 2008-05-27 |
| 7355715 | Temperature measuring apparatus, temperature measurement method, temperature measurement system, control system and control method | Tomohiro Suzuki | 2008-04-08 |
| 7339656 | Method and apparatus for measuring electron density of plasma and plasma processing apparatus | Naoki Matsumoto, Yohei Yamazawa, Tatsuo Matsudo, Sumie Segawa | 2008-03-04 |
| 7335278 | Plasma processing apparatus and plasma processing method | Hiroyuki Ishihara, Kimihiro Higuchi, Koji Maruyama | 2008-02-26 |
| 7018506 | Plasma processing apparatus | Toshiaki Hongoh, Naoki Matsumoto | 2006-03-28 |
| 6949165 | Plasma processing apparatus | — | 2005-09-27 |
| 6818560 | Plasma processing apparatus and plasma processing method | Kazunori Nagahata | 2004-11-16 |
| 6773158 | Resonant circuit for measuring temperature profile of a semiconductor substrate | — | 2004-08-10 |
| 6676804 | Method and apparatus for plasma processing | Hiroyuki Ishihara, Kimihiro Higuchi, Koji Maruyama | 2004-01-13 |
| 6576860 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Jun Ooyabu, Hideki Takeuchi, Akira Koshiishi | 2003-06-10 |
| 6426477 | Plasma processing method and apparatus for eliminating damages in a plasma process of a substrate | Jun Ooyabu, Hideki Takeuchi, Akira Koshiishi | 2002-07-30 |
| 6297064 | End point detecting method for semiconductor plasma processing | — | 2001-10-02 |
| 6214162 | Plasma processing apparatus | — | 2001-04-10 |
| 6162323 | Plasma processing apparatus | — | 2000-12-19 |
| 6101970 | Plasma processing apparatus | — | 2000-08-15 |
| 6000360 | Plasma processing apparatus | — | 1999-12-14 |
| 5997687 | Plasma processing apparatus | — | 1999-12-07 |