Issued Patents All Time
Showing 151–162 of 162 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5980767 | Method and devices for detecting the end point of plasma process | Kimihiro Higuchi | 1999-11-09 |
| 5980687 | Plasma processing apparatus comprising a compensating-process-gas supply means in synchronism with a rotating magnetic field | — | 1999-11-09 |
| 5935373 | Plasma processing apparatus | — | 1999-08-10 |
| 5928532 | Method of detecting end point of plasma processing and apparatus for the same | Susumu Saito | 1999-07-27 |
| 5783492 | Plasma processing method, plasma processing apparatus, and plasma generating apparatus | Kimihiro Higuchi, Ryoichiro Koshi, Teruo Iwata, Nobuo Ishii | 1998-07-21 |
| 5770098 | Etching process | Yoichi Araki, Koichiro Inazawa, Sachiko Furuya, Masahiro Ogasawara, Tiejun Song | 1998-06-23 |
| 5571366 | Plasma processing apparatus | Nobuo Ishii, Jiro Hata, Yoshifumi Tahara, Hiroshi Nishikawa, Isei Imahashi | 1996-11-05 |
| 5565114 | Method and device for detecting the end point of plasma process | Susumu Saito, Kazuo Eguchi | 1996-10-15 |
| 5374327 | Plasma processing method | Issei Imahashi, Nobuo Ishii | 1994-12-20 |
| 5322590 | Plasma-process system with improved end-point detecting scheme | — | 1994-06-21 |
| 5290383 | Plasma-process system with improved end-point detecting scheme | — | 1994-03-01 |
| 4862383 | Ultrasonic inspection apparatus | Yasuo Hayakawa, Toshio Nonaka, Sakae Takeda | 1989-08-29 |