Issued Patents All Time
Showing 51–75 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7592259 | Methods and systems for barrier layer surface passivation | Yezdi Dordi, Fritz Redeker, William Thie, Tiruchirapalli Arunagiri, Alex Yoon | 2009-09-22 |
| 7584761 | Wafer edge surface treatment with liquid meniscus | Seokmin Yun, John M. de Larios, Fritz Redeker | 2009-09-08 |
| 7582565 | Method and apparatus for semiconductor wafer planarization | Fred C. Redeker, Yezdi Dordi, William Thie, Bob Maraschin | 2009-09-01 |
| 7568488 | Enhanced wafer cleaning method | Seokmin Yun, Mark Wilcoxson, John deLarios | 2009-08-04 |
| 7563348 | Electroplating head and method for operating the same | Yezdi Dordi, Bob Maraschin, Fred C. Redeker | 2009-07-21 |
| 7520284 | Apparatus for developing photoresist and method for operating the same | Fritz Redeker, David Hemker | 2009-04-21 |
| 7503983 | Methods of proximity head brushing | Michael L. Orbock, Fred C. Redeker | 2009-03-17 |
| 7396430 | Apparatus and method for confined area planarization | Fritz Redeker, Yezdi Dordi, Michael Ravkin, John M. de Larios | 2008-07-08 |
| 7368017 | Method and apparatus for semiconductor wafer planarization | Fred C. Redeker, Yezdi Dordi, William Thie, Bob Maraschin | 2008-05-06 |
| 7367345 | Apparatus and method for providing a confined liquid for immersion lithography | David Hemker, Fred C. Redeker, John M. de Larios, Michael Ravkin, Mikhail Korolik | 2008-05-06 |
| 7358186 | Method and apparatus for material deposition in semiconductor fabrication | Yezdi Dordi, William Thie, Bob Maraschin, Fred C. Redeker, Joel M. Cook | 2008-04-15 |
| 7353560 | Proximity brush unit apparatus and method | Michael L. Orbock, Fred C. Redeker | 2008-04-08 |
| 7329321 | Enhanced wafer cleaning method | Seokmin Yun, Mark Wilcoxson, John deLarios | 2008-02-12 |
| 7264007 | Method and apparatus for cleaning a substrate using megasonic power | Mike Ravkin, Fred C. Redeker, John M. de Larios | 2007-09-04 |
| 7252736 | Compliant grinding wheel | Fred C. Redeker, Yezdi Dordi | 2007-08-07 |
| 7252097 | System and method for integrating in-situ metrology within a wafer process | John M. de Larios, Michael Ravkin, Fred C. Redeker | 2007-08-07 |
| 7237564 | Distribution of energy in a high frequency resonating wafer processing system | Tom Anderson | 2007-07-03 |
| 7231682 | Method and apparatus for simultaneously cleaning the front side and back side of a wafer | Katrina Mikhaylich, Fred C. Redeker | 2007-06-19 |
| 7191787 | Method and apparatus for semiconductor wafer cleaning using high-frequency acoustic energy with supercritical fluid | Fred C. Redeker, John Parks | 2007-03-20 |
| 7179154 | Method and apparatus for cleaning a wafer bevel edge and notch using a pin and an abrasive film cassette | Fritz Redeker, Jason A. Ryder, Aleksander Owczarz | 2007-02-20 |
| 7170190 | Apparatus for oscillating a head and methods for implementing the same | Randolph Treur, Tom Anderson, John M. de Larios | 2007-01-30 |
| 7165563 | Method and apparatus to decouple power and cavitation for megasonic cleaning applications | Michael Ravkin, Fred C. Redecker | 2007-01-23 |
| 7153400 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | Mike Ravkin, Yezdi Dordi, Fred C. Redeker, John M. de Larios | 2006-12-26 |
| 7128279 | Method and apparatus for fluid delivery to a backside of a substrate | Carl Woods | 2006-10-31 |
| 7108591 | Compliant wafer chuck | Fred C. Redeker, Yezdi Dordi | 2006-09-19 |