Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7165563 | Method and apparatus to decouple power and cavitation for megasonic cleaning applications | John M. Boyd, Michael Ravkin | 2007-01-23 |
| 6910240 | Wafer bevel edge cleaning system and apparatus | John M. Boyd, James P. Garcia | 2005-06-28 |