| 8598550 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more |
2013-12-03 |
| 8362444 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method |
Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev |
2013-01-29 |
| 8134136 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken +4 more |
2012-03-13 |
| 8018574 |
Lithographic apparatus, radiation system and device manufacturing method |
Robert Rafilevitch Gayazov, Vadim Yevgenyevich Banine, Evgenii Dmitreevitch Korob, Konstantin Nikolaevitch Koshelev, Givi Georgievitch Zukavishvili +1 more |
2011-09-13 |
| 7838853 |
Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing method |
Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev |
2010-11-23 |
| 7812330 |
Radical cleaning arrangement for a lithographic apparatus |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen |
2010-10-12 |
| 7767989 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Josephus Jacobus Smits, Harm-Jan Voorma, Lambertus Adrianus Van Den Wildenberg, Vladimir Mihailovitch Krivtsun +4 more |
2010-08-03 |
| 7696493 |
Radiation system and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Derk Jan Wilfred Klunder |
2010-04-13 |
| 7696492 |
Radiation system and lithographic apparatus |
Arnoud Cornelis Wassink, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Theodorus Petrus Maria Cadee, Vladimir Mihailovitch Krivtsun +4 more |
2010-04-13 |
| 7684012 |
Lithographic device, device manufacturing method and device manufactured thereby |
Johannes Henricus Wilhelmus Jacobs, Vadim Yevgenyevich Banine, Barrie Dudley Brewster, Bastiaan Mertens, Johannes Hubertus Josephina Moors +2 more |
2010-03-23 |
| 7557366 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vadim Yevgenyevich Banine, Vladimir Mihailovitch Krivtsun |
2009-07-07 |
| 7518134 |
Plasma radiation source for a lithographic apparatus |
Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun |
2009-04-14 |
| 7504643 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Johannes Maria Freriks, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen |
2009-03-17 |
| 7501642 |
Radiation source |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Johannes Christiaan Leonardus Franken, Konstantin Nikolaevitch Koshelev, Alexander Matthijs Struycken |
2009-03-10 |
| 7495239 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement |
Johannes Maria Freriks, Vadim Yevgenyevich Banine |
2009-02-24 |
| 7462850 |
Radical cleaning arrangement for a lithographic apparatus |
Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen |
2008-12-09 |
| 7462851 |
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby |
Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsun |
2008-12-09 |
| 7372058 |
Ex-situ removal of deposition on an optical element |
Vadim Yevgenyevich Banine, Lambertus Adrianus Wildenberg, Vladimir Mihailovitch Krivtsun, Alexander Matthijs Struycken, Johannes Bernardus Ridder +1 more |
2008-05-13 |
| 7335900 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsun |
2008-02-26 |
| 7279690 |
Lithographic apparatus and device manufacturing method |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Bastiaan Mertens, Johannes Hubertus Josephina Moors +4 more |
2007-10-09 |
| 7251012 |
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris |
Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Givi Georgievitch Zukavishvili, Abraham Veefkind |
2007-07-31 |
| 7208746 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
Konstantin Nikolaevitch Koshelev, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsum |
2007-04-24 |
| 7135692 |
Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation |
Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev |
2006-11-14 |
| 7061574 |
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby |
Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun |
2006-06-13 |
| 6862075 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby |
Norbertus Benedictus Koster, Bastiaan Mertens, Martinus Hendrikus Antonius Leenders, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine |
2005-03-01 |