Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056325 | Methods and apparatus for substrate edge uniformity | Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao, Xianmin Tang +1 more | 2021-07-06 |
| 10886113 | Process kit and method for processing a substrate | Weimin Zeng, Yong Cao | 2021-01-05 |
| 10734235 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Zhiyong Wang, Jianxin Lei, Xianmin Tang | 2020-08-04 |
| 10199204 | Target retaining apparatus | Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Muhammad M. Rasheed +1 more | 2019-02-05 |
| 10096455 | Extended dark space shield | Rongjun Wang, Muhammad M. Rasheed, Xianmin Tang | 2018-10-09 |
| 10043670 | Systems and methods for low resistivity physical vapor deposition of a tungsten film | Jothilingam Ramalingam, Zhiyong Wang, Jianxin Lei, Xianmin Tang | 2018-08-07 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, Uday Pai, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed +1 more | 2018-05-01 |
| 9928997 | Apparatus for PVD dielectric deposition | Keith A. Miller, Ilya Lavitsky, Randy D. Schmieding, Prashanth Kothnur | 2018-03-27 |
| 9773665 | Particle reduction in a physical vapor deposition chamber | Weimin Zeng, Yong Cao | 2017-09-26 |
| 9633839 | Methods for depositing dielectric films via physical vapor deposition processes | Weimin Zeng, Yana Cheng, Yong Cao, Daniel Lee Diehl, Srinivas Guggilla +2 more | 2017-04-25 |
| 9633824 | Target for PVD sputtering system | Yong Cao, Muhammad M. Rasheed, Xianmin Tang | 2017-04-25 |
| 9340866 | Substrate support with radio frequency (RF) return path | Alan A. Ritchie, Donny Young, Wei Wang, Ananthkrishna Jupudi, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9281167 | Variable radius dual magnetron | Rongjun Wang, Muhammad M. Rasheed, Xianmin Tang | 2016-03-08 |
| 9087679 | Uniformity tuning capable ESC grounding kit for RF PVD chamber | Muhammad M. Rasheed, Rongjun Wang, Alan A. Ritchie | 2015-07-21 |
| 8895450 | Low resistivity tungsten PVD with enhanced ionization and RF power coupling | Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more | 2014-11-25 |
| 8580094 | Magnetron design for RF/DC physical vapor deposition | Rongjun Wang, Sally S. Lou, Muhammad M. Rasheed, Jianxin Lei, Xianmin Tang +4 more | 2013-11-12 |
| 8558299 | Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming | Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more | 2013-10-15 |
| 7804303 | Apparatus and method for detecting a brush liftoff in a synchronous generator rotor circuit | Gabriel Benmouyal | 2010-09-28 |
| 7498818 | Apparatus and method for detecting a brush liftoff in a synchronous generator rotor circuit | Gabriel Benmouyal | 2009-03-03 |
| 5675259 | Method and apparatus for measuring fluid flow | G. Dickey Arndt, James R. Carl | 1997-10-07 |
| 5596150 | Capacitance probe for fluid flow and volume measurements | G. Dickey Arndt, James R. Carl | 1997-01-21 |