RC

Robert D. Clark

TL Tokyo Electron Limited: 82 patents #17 of 5,567Top 1%
Air Products And Chemicals: 4 patents #485 of 1,997Top 25%
TR Tripos: 4 patents #1 of 20Top 5%
TL Toyko Electron Limited: 1 patents #1 of 31Top 4%
IBM: 1 patents #44,794 of 70,183Top 65%
Overall (All Time): #15,238 of 4,157,543Top 1%
97
Patents All Time

Issued Patents All Time

Showing 25 most recent of 97 patents

Patent #TitleCo-InventorsDate
12421604 Ultra-shallow dopant and ohmic contact regions by solid state diffusion 2025-09-23
12406887 Selective film formation using a self-assembled monolayer Dina H. Triyoso, Lior Huli, Corey Lemley, Gerrit J. Leusink 2025-09-02
12372871 EUV active films for EUV lithography 2025-07-29
12362304 Bonding layer and process of making 2025-07-15
12272601 Epitaxial high-K etch stop layer for backside reveal integration 2025-04-08
12261209 Replacement channel 2D material integration H. Jim Fulford, Mark I. Gardner 2025-03-25
12237216 Method for filling recessed features in semiconductor devices with a low-resistivity metal Kai-Hung Yu, Shihsheng Chang, Ying Trickett, Eric Chih-Fang Liu, Yun Han +5 more 2025-02-25
12211907 Semiconductor manufacturing platform with in-situ electrical bias and methods thereof Dina H. Triyoso, David Hurley, Ian Colgan 2025-01-28
12191297 Facilitating alignment of stacked chiplets 2025-01-07
12148625 Methods to prevent surface charge induced cd-dependent etching of material formed within features on a patterned substrate Shan Hu, Henan Zhang, Sangita Kumari, Peter Delia 2024-11-19
11978735 Transistor stack of vertical channel ferroelectric FETs and methods of forming the transistor stack Mark I. Gardner, H. Jim Fulford 2024-05-07
11967640 Crystalline dielectric systems for interconnect circuit manufacturing 2024-04-23
11942536 Semiconductor device having channel structure with 2D material H. Jim Fulford, Mark I. Gardner 2024-03-26
11894240 Semiconductor processing systems with in-situ electrical bias David Hurley, Ioan Domsa, Ian Colgan, Gerhardus Van Der Linde, Patrick Hughes +6 more 2024-02-06
11769677 Substrate processing tool with integrated metrology and method of using Kandabara Tapily 2023-09-26
11764113 Method of 3D logic fabrication to sequentially decrease processing temperature and maintain material thermal thresholds Jeffrey Smith, Daniel Chanemougame, Lars Liebmann, Paul Gutwin, Anton J. deVilliers 2023-09-19
11621190 Method for filling recessed features in semiconductor devices with a low-resistivity metal Kai-Hung Yu, David L. O'Meara, Nicholas Joy, Gyanaranjan Pattanaik, Kandabara Tapily +3 more 2023-04-04
11594451 Platform and method of operating for integrated end-to-end fully self-aligned interconnect process Kandabara Tapily, Kai-Hung Yu 2023-02-28
11462414 Atomic layer etching of metal oxides 2022-10-04
11456212 Platform and method of operating for integrated end-to-end fully self-aligned interconnect process Kandabara Tapily, Kai-Hung Yu 2022-09-27
11424236 Facilitating alignment of stacked chiplets 2022-08-23
11398379 Platform and method of operating for integrated end-to-end self-aligned multi-patterning process Richard A. Farrell, Kandabara Tapily, Angelique Raley, Sophie Thibaut 2022-07-26
11302588 Platform and method of operating for integrated end-to-end area-selective deposition process Kandabara Tapily, Jason Mehigan 2022-04-12
11264254 Substrate processing tool with integrated metrology and method of using Kandabara Tapily 2022-03-01
11152268 Platform and method of operating for integrated end-to-end area-selective deposition process Kandabara Tapily, Jason Mehigan 2021-10-19