Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811233 | Process chamber having tunable showerhead and tunable liner | Andrew Nguyen, Xue Yang Chang, Haitao Wang, Kei-Yu Ko | 2020-10-20 |
| 9805965 | Pixelated capacitance controlled ESC | Wendell Glen Boyd, Jr., Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-10-31 |
| 9646843 | Tunable magnetic field to improve uniformity | Andrew Nguyen, Tza-Jing Gung, Haitao Wang, Maxim Mikhailovich Noginov, Chunlei Zhang +1 more | 2017-05-09 |
| 9536769 | Pixelated capacitance controlled ESC | Wendell Glen Boyd, Jr., Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2017-01-03 |
| 9472410 | Pixelated capacitance controlled ESC | Wendell Glen Boyd, Jr., Vijay D. Parkhe, Maxim Mikhailovich Noginov | 2016-10-18 |
| 9111724 | Apparatus and method for controlling plasma potential | Douglas Keil, Lumin Li, Eric A. Hudson, Eric H. Lenz, Rajinder Dhindsa | 2015-08-18 |
| 8673785 | Gas distribution system having fast gas switching capabilities | Zhisong Huang, Jose Tong Sam, Eric H. Lenz, Rajinder Dhindsa | 2014-03-18 |
| 7838086 | Magnetic enhancement for mechanical confinement of plasma | Douglas Keil, Lumin Li, Eric A. Hudson, Eric H. Lenz, Rajinder Dhindsa +1 more | 2010-11-23 |
| 7708859 | Gas distribution system having fast gas switching capabilities | Zhisong Huang, Jose Tong Sam, Eric H. Lenz, Rajinder Dhindsa | 2010-05-04 |
| 7632375 | Electrically enhancing the confinement of plasma | Andras Kuthi, Jisoo Kim, Eric H. Lenz, Rajindar Dhindsa, Lumin Li | 2009-12-15 |
| 7455748 | Magnetic enhancement for mechanical confinement of plasma | Douglas Keil, Lumin Li, Eric A. Hudson, Eric H. Lenz, Rajinder Dhindsa +1 more | 2008-11-25 |
| 7452660 | Method for resist strip in presence of low K dielectric material and apparatus for performing the same | Zhisong Huang | 2008-11-18 |
| 7294580 | Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition | Seokmin Yun, Ji Zhu, Peter Cirigliano, Sangheon Lee, Thomas S. Choi +4 more | 2007-11-13 |
| 7288488 | Method for resist strip in presence of regular low k and/or porous low k dielectric materials | Helen Zhu | 2007-10-30 |
| 7192531 | In-situ plug fill | Sean S. Kang, Sangheon Lee, Wan-Lin Chen, Eric A. Hudson | 2007-03-20 |
| 7169695 | Method for forming a dual damascene structure | Zhisong Huang, Lumin Li | 2007-01-30 |
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Jisoo Kim, Sangheon Lee, Sean S. Kang, Binet Worsham, Bi-Ming Yen +1 more | 2005-12-27 |
| 6780569 | Post-development treatment of patterned photoresist to promote cross-linking of polymer chains | Eric A. Hudson, Daxing Ren, Wan-Lin Chen, Douglas Keil, Peter Cirigliano | 2004-08-24 |
| 6518174 | Combined resist strip and barrier etch process for dual damascene structures | Rao Annapragada | 2003-02-11 |