Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8673785 | Gas distribution system having fast gas switching capabilities | Zhisong Huang, Eric H. Lenz, Rajinder Dhindsa, Reza Sadjadi | 2014-03-18 |
| 8343876 | Fast gas switching plasma processing apparatus | S. M. Reza Sadjadi, Zhisong Huang, Eric H. Lenz, Rajinder Dhindsa | 2013-01-01 |
| 7708859 | Gas distribution system having fast gas switching capabilities | Zhisong Huang, Eric H. Lenz, Rajinder Dhindsa, Reza Sadjadi | 2010-05-04 |