Issued Patents All Time
Showing 25 most recent of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12401338 | Multiple-output radiofrequency matching module and associated methods | Sunil Kapoor, Bradford J. Lyndaker | 2025-08-26 |
| 12394601 | Impedance transformation in radio-frequency-assisted plasma generation | Eller Y. Juco, Thomas Frederick, Paul Konkola | 2025-08-19 |
| 12379720 | Common terminal heater for ceramic pedestals used in semiconductor for fabrication | — | 2025-08-05 |
| 12371781 | In situ protective coating of chamber components for semiconductor processing | Akhil Singhal, David Charles Smith | 2025-07-29 |
| 12368029 | Lamellar ceramic structure | Joel Hollingsworth, Ramkishan Rao Lingampalli | 2025-07-22 |
| 12322582 | Anomalous plasma event detection and mitigation in semiconductor processing | Sunil Kapoor, Noah Elliot Baker, Liang Meng, Yukinori Sakiyama | 2025-06-03 |
| 12322641 | Mechanical indexer for multi-station process module | Michael Nordin, Richard M. Blank, Robert Sculac, Damien Slevin | 2025-06-03 |
| 12315705 | Distortion of pulses for wafer biasing | John Holland | 2025-05-27 |
| 12308216 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Mohamed Sabri | 2025-05-20 |
| 12217939 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | David French, Vincent E. Burkhart, Liang Meng | 2025-02-04 |
| 12215989 | Differential-pressure-based flow meters | John F. Stumpf | 2025-02-04 |
| 12211685 | Joining techniques for composite ceramic bodies | — | 2025-01-28 |
| 12136938 | Closed-loop multiple-output radio frequency (RF) matching | Eller Y. Juco | 2024-11-05 |
| 12052006 | Mutually induced filters | Sunil Kapoor, Aaron W. Logan, Hyungjoon Kim, Yaswanth Rangineni | 2024-07-30 |
| 12040770 | Multiple-output radiofrequency matching module and associated methods | Sunil Kapoor, Bradford J. Lyndaker | 2024-07-16 |
| 11996301 | Modular-component system for gas delivery | John F. Stumpf, Damien Long, Norman Nakashima | 2024-05-28 |
| 11984298 | Impedance transformation in radio-frequency-assisted plasma generation | Eller Y. Juco, Thomas Frederick, Paul Konkola | 2024-05-14 |
| 11955366 | Pad raising mechanism in wafer positioning pedestal for semiconductor processing | Paul Konkola, Easwar Srinivasan | 2024-04-09 |
| 11862435 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Mohamed Sabri | 2024-01-02 |
| 11837443 | Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression | Michael John Selep, Patrick Breiling, Timothy Scott Thomas, David William Kamp, Sean M. Donnelly | 2023-12-05 |
| 11784027 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Vince Burkhart | 2023-10-10 |
| 11768011 | Apparatus for thermal control of tubing assembly and associated methods | — | 2023-09-26 |
| 11725282 | Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate region | Chunguang Xia, Ramesh Chandrasekharan, Douglas Keil, Edward Augustyniak | 2023-08-15 |
| 11699610 | Rotational indexer with additional rotational axes | Richard M. Blank | 2023-07-11 |
| 11670535 | Carrier plate for use in plasma processing systems | — | 2023-06-06 |