Issued Patents All Time
Showing 25 most recent of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8079894 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norman Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee | 2011-12-20 |
| 7637707 | Apparatus for storing and moving a cassette | Evgueni Gantvarg, Victor Belitsky | 2009-12-29 |
| 7614939 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norman Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee | 2009-11-10 |
| 7255632 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee | 2007-08-14 |
| 7238090 | Polishing apparatus having a trough | Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee | 2007-07-03 |
| 7097544 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee | 2006-08-29 |
| 6896584 | Method of controlling carrier head with multiple chambers | Eugene Gantvarg, Sen-Hou Ko | 2005-05-24 |
| 6648740 | Carrier head with a flexible membrane to form multiple chambers | Eugene Gantvarg, Sen-Hou Ko | 2003-11-18 |
| 6575737 | Method and apparatus for improved substrate handling | Alexey Goder, Evgueni Gantvarg, Howard Grunes | 2003-06-10 |
| 6532866 | Method and apparatus for orienting substrates | Eugene Gantvarg, Leonid M. Tertitski | 2003-03-18 |
| 6506104 | Carrier head with a flexible membrane | Eugene Gantvarg, Sen-Hou Ko | 2003-01-14 |
| 6468353 | Method and apparatus for improved substrate handling | Alexey Goder, Eugene Gantvarg, Howard Grunes | 2002-10-22 |
| 6393337 | Method and apparatus for orienting substrates | Eugene Gantvarg, Leonid M. Tertitski | 2002-05-21 |
| 6374508 | Apparatus and method for aligning a substrate on a support member | Joseph Yudovsky, Kenneth Tsai, Eugene Gantvarg | 2002-04-23 |
| 6293853 | Conditioner apparatus for chemical mechanical polishing | Eugene Gantvarg | 2001-09-25 |
| 6287386 | Carousel wafer transfer system | Alexey Goder, Eugene Gantvarg | 2001-09-11 |
| 6283692 | Apparatus for storing and moving a cassette | Evgueni Gantvarg, Victor Belitsky | 2001-09-04 |
| 6277010 | Carrier head with a flexible membrane for a chemical mechanical polishing system | Eugene Gantvarg, Sen-Hou Ko | 2001-08-21 |
| 6167834 | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process | David N. Wang, John M. White, Kam S. Law, Cissy Leung, Salvador P. Umotoy +3 more | 2001-01-02 |
| 6146463 | Apparatus and method for aligning a substrate on a support member | Joseph Yudovsky, Kenneth Tsai, Eugene Gantvarg | 2000-11-14 |
| 6143127 | Carrier head with a retaining ring for a chemical mechanical polishing system | Eugene Gantvarg | 2000-11-07 |
| 6126517 | System for chemical mechanical polishing having multiple polishing stations | Robert D. Tolles, Norm Shendon, Sasson Somekh, Eugene Gantvarg, Harry Q. Lee | 2000-10-03 |
| 6103014 | Chemical vapor deposition chamber | Lawrence Chung-Lai Lei, Karl A. Littau, Alan F. Morrison, Mei Chang, Ashok Sinha | 2000-08-15 |
| 6086457 | Washing transfer station in a system for chemical mechanical polishing | Eugene Gantvarg | 2000-07-11 |
| 6082951 | Wafer cassette load station | Eric A. Nering, Eugene Gantvarg, Victor Belitsky | 2000-07-04 |