| 7263216 |
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof |
Chie Shishido, Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Takashi Hiroi +1 more |
2007-08-28 |
| 6831998 |
Inspection system for circuit patterns and a method thereof |
Hiroya Koshishiba, Mitsunobu Isobe, Kazushi Yoshimura, Haruomi Kobayashi, Chie Shishido |
2004-12-14 |
| 6650409 |
Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system |
Minori Noguchi, Yukio Kembo, Hiroshi Morioka, Hidetoshi Nishiyama, Masataka Shiba +6 more |
2003-11-18 |
| 6622054 |
Method monitoring a quality of electronic circuits and its manufacturing condition and system for it |
Hirohito Okuda, Toshifumi Honda, Hisae Yamamura, Yuji Takagi, Shigeshi Yoshinaga |
2003-09-16 |
| 6614923 |
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof |
Chie Shishido, Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Takashi Hiroi +1 more |
2003-09-02 |
| 6546308 |
Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices |
Yuji Takagi, Makoto Ono |
2003-04-08 |
| 6438438 |
Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices |
Yuji Takagi, Makoto Ono |
2002-08-20 |
| 6376854 |
Method of inspecting a pattern on a substrate |
Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more |
2002-04-23 |
| 6278418 |
Three-dimensional imaging system, game device, method for same and recording medium |
— |
2001-08-21 |
| 6236057 |
Method of inspecting pattern and apparatus thereof with a differential brightness image detection |
Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more |
2001-05-22 |
| 6087673 |
Method of inspecting pattern and apparatus thereof |
Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more |
2000-07-11 |
| 6072899 |
Method and device of inspecting three-dimensional shape defect |
Yoko Irie, Hiroya Koshishiba, Mineo Nomoto |
2000-06-06 |
| 5930382 |
Wiring pattern inspecting method and system for carrying out the same |
Yoko Irie, Yasuhiko Hara, Tadashi Iida, Yasuhiro Fujishita, Yasuo Nakagawa +1 more |
1999-07-27 |
| 5801965 |
Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices |
Yuji Takagi, Makoto Ono |
1998-09-01 |
| 5754621 |
X-ray inspection method and apparatus, prepreg inspecting method, and method for fabricating multi-layer printed circuit board |
Yoko Suzuki, Yasuhiko Hara, Koichi Karasaki, Tadashi Iida |
1998-05-19 |
| 5331407 |
Method and apparatus for detecting a circuit pattern |
Yasuhiko Hara, Koichi Karasaki |
1994-07-19 |
| 5308875 |
Therapeutic coolant for the local treatment of burn |
Yutaka Ogawa |
1994-05-03 |
| 5086140 |
Optical material formed by casting polymerization of a phenyl phosphine monomer |
Teruo Sakagami |
1992-02-04 |
| 4975223 |
Optical material |
Teruo Sakagami |
1990-12-04 |
| 4962541 |
Pattern test apparatus |
Yasuhiko Hara, Akira Sase, Satoshi Shinada |
1990-10-09 |
| 4908871 |
Pattern inspection system |
Yasuhiko Hara, Koichi Karasaki, Akira Sase |
1990-03-13 |
| 4628531 |
Pattern checking apparatus |
Keiichi Okamoto, Kozo Nakahata, Yukio Matsuyama, Susumu Aiuchi, Mineo Nomoto |
1986-12-09 |
| 4504631 |
Photoresist material |
Kenichi Kokubun, Teruo Sakagami, Naohiro Murayama |
1985-03-12 |
| 4341837 |
Laminar thermoplastic resin structure |
Takayuki Katsuto, Shunzo Endo, Naohiro Murayama |
1982-07-27 |