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Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle |
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Pellicle and pellicle assembly |
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Pellicle and pellicle assembly |
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Substrate support, lithographic apparatus and loading method |
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Metal-silicide-nitridation for stress reduction |
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Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing |
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Membrane for EUV lithography |
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| 11754918 |
Pellicle and pellicle assembly |
Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen, Paul Janssen +18 more |
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| 11686997 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more |
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Membrane cleaning apparatus |
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2023-06-13 |
| 11556063 |
Substrate support, lithographic apparatus and loading method |
Johannes Onvlee, Antonius Franciscus Johannes De Groot, Wim Symens |
2023-01-17 |
| 11467486 |
Graphene pellicle lithographic apparatus |
Evgenia KURGANOVA, Adrianus Johannes Maria Giesbers, Alexander Ludwig KLEIN, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom +4 more |
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| 11347142 |
Pellicle and pellicle assembly |
Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more |
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Membrane for EUV lithography |
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Pellicle frame and pellicle assembly |
Anton Wilhelmus Duys, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom, Mária Péter, Pieter-Jan Van Zwol |
2022-04-26 |
| 11287737 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more |
2022-03-29 |
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Pellicle and pellicle assembly |
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2022-01-25 |
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Alignment measurement system |
Stefan Michiel Witte, Alessandro Antoncecchi, Hao Zhang, Stephen EDWARD, Paulus Clemens Maria PLANKEN +3 more |
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Membrane assembly |
Derk Servatius Gertruda Brouns, Paul Janssen, Mohammad Reza KAMALI, Mária Péter, Willem Joan Van Der Zande +2 more |
2021-06-15 |
| 10983431 |
Pellicle and pellicle assembly |
Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more |
2021-04-20 |
| 10976196 |
Sensor mark and a method of manufacturing a sensor mark |
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2021-04-13 |
| 10908496 |
Membrane for EUV lithography |
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Lithographic apparatus |
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Method for manufacturing a membrane assembly |
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| 10466585 |
Pellicle and pellicle assembly |
Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more |
2019-11-05 |