| 10262866 |
Indium phosphide smoothing and chemical mechanical planarization processes |
Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Dinesh Kumar Penigalapati +2 more |
2019-04-16 |
$3,839,000 |
| 9916985 |
Indium phosphide smoothing and chemical mechanical planarization processes |
Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Dinesh Kumar Penigalapati +2 more |
2018-03-13 |
$2,527,000 |
| 9890300 |
Germanium smoothing and chemical mechanical planarization processes |
Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Dinesh Kumar Penigalapati, Rachel S. Steiner +1 more |
2018-02-13 |
$2,196,000 |
| 9646841 |
Group III arsenide material smoothing and chemical mechanical planarization processes |
Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Dinesh Kumar Penigalapati +2 more |
2017-05-09 |
$2,584,000 |
| 9646842 |
Germanium smoothing and chemical mechanical planarization processes |
Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Dinesh Kumar Penigalapati, Rachel S. Steiner +1 more |
2017-05-09 |
$2,584,000 |
| 8263497 |
High-yield method of exposing and contacting through-silicon vias |
Paul S. Andry, John M. Cotte, Michael F. Lofaro, Edmund J. Sprogis, Cornelia K. Tsang |
2012-09-11 |
$6,476,000 |
| 7955160 |
Glass mold polishing method and structure |
Michael A. Cobb, Dinesh R. Koli, Michael F. Lofaro, Dennis G. Manzer, Paraneetha Poloju |
2011-06-07 |
$3,978,000 |
| 7581314 |
Method of forming noble metal contacts |
Hariklia Deligianni, Panayotis Andricacos, L. Paivikki Buchwalter, John M. Cotte, Christopher V. Jahnes +5 more |
2009-09-01 |
$20,741,000 |
| 7202764 |
Noble metal contacts for micro-electromechanical switches |
Hariklia Deligianni, Panayotis Andricacos, L. Paivikki Buchwalter, John M. Cotte, Christopher V. Jahnes +5 more |
2007-04-10 |
$7,482,000 |
| 7199450 |
Materials and method to seal vias in silicon substrates |
Jon A. Casey, Michael Berger, Leena Paivikki Buchwalter, Donald F. Canaperi, Raymond R. Horton +2 more |
2007-04-03 |
$7,379,000 |
| 6812193 |
Slurry for mechanical polishing (CMP) of metals and use thereof |
Michael T. Brigham, Donald F. Canaperi, Michael A. Cobb, William J. Cote, Kenneth M. Davis +9 more |
2004-11-02 |
$9,962,000 |
| 6800503 |
MEMS encapsulated structure and method of making same |
Joseph T. Kocis, Kevin S. Petrarca, Richard P. Volant, Seshadri Subbanna |
2004-10-05 |
$8,713,000 |
| 6503834 |
Process to increase reliability CuBEOL structures |
Xiaomeng Chen, Mahadevaiyer Krishnan, Judith M. Rubino, Carlos J. Sambucetti, Soon-Cheon Seo |
2003-01-07 |
$16,905,000 |
| 6361402 |
Method for planarizing photoresist |
Donald F. Canaperi, Rangarajan Jagannathan, Mahadevaiyer Krishnan, Max G. Levy, Uma Satyendra +2 more |
2002-03-26 |
$26,805,000 |
