Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10262866 | Indium phosphide smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Rachel S. Steiner +2 more | 2019-04-16 |
| 9916985 | Indium phosphide smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Rachel S. Steiner +2 more | 2018-03-13 |
| 9890300 | Germanium smoothing and chemical mechanical planarization processes | Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Rachel S. Steiner, James A. Tornello +1 more | 2018-02-13 |
| 9646842 | Germanium smoothing and chemical mechanical planarization processes | Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Rachel S. Steiner, James A. Tornello +1 more | 2017-05-09 |
| 9646841 | Group III arsenide material smoothing and chemical mechanical planarization processes | Henry A. Beveridge, Tatsuyoshi Kawamoto, Mahadevaiyer Krishnan, Yohei Oishi, Rachel S. Steiner +2 more | 2017-05-09 |
| 8524606 | Chemical mechanical planarization with overburden mask | Leslie M. Charns, John M. Cotte, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli +6 more | 2013-09-03 |
| 8513127 | Chemical mechanical planarization processes for fabrication of FinFET devices | Josephine B. Chang, Leslie M. Charns, Jason E. Cummings, Michael A. Guillorn, Lukasz J. Hupka +7 more | 2013-08-20 |
| 8507383 | Fabrication of replacement metal gate devices | Takashi Ando, Leslie M. Charns, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli +6 more | 2013-08-13 |
| 8497210 | Shallow trench isolation chemical mechanical planarization | Leslie M. Charns, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli, Tomohisa Konno +5 more | 2013-07-30 |