EL

Eng Hua Lim

CM Chartered Semiconductor Manufacturing: 24 patents #29 of 840Top 4%
IBM: 4 patents #21,733 of 70,183Top 35%
GP Globalfoundries Singapore Pte.: 1 patents #427 of 828Top 55%
NS National University Of Singapore: 1 patents #498 of 1,623Top 35%
Overall (All Time): #155,835 of 4,157,543Top 4%
26
Patents All Time

Issued Patents All Time

Showing 1–25 of 26 patents

Patent #TitleCo-InventorsDate
8148221 Double anneal with improved reliability for dual contact etch stop liner scheme Khee Yong Lim, Victor Chan, Wenhe Lin, Jamin F. Fen 2012-04-03
7615433 Double anneal with improved reliability for dual contact etch stop liner scheme Khee Yong Lim, Victor Chan, Wenhe Lin, Jamin F. Fen 2009-11-10
7545004 Method and structure for forming strained devices Haining Yang 2009-06-09
7396724 Dual-hybrid liner formation without exposing silicide layer to photoresist stripping chemicals Victor Chan, Haining Yang, Yong Meng Lee 2008-07-08
6841441 Method to produce dual gates (one metal and one poly or metal silicide) for CMOS devices using sputtered metal deposition, metallic ion implantation, or silicon implantation, and laser annealing Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2005-01-11
6828082 Method to pattern small features by using a re-flowable hard mask Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2004-12-07
6762085 Method of forming a high performance and low cost CMOS device Jia Zhen Zheng, Soh Yun Siah, Liang-Choo Hsia, Simon Chooi, Chew Hoe Ang 2004-07-13
6664156 Method for forming L-shaped spacers with precise width control Chew Hoe Ang, Wenhe Lin, Jia Zhen Zheng 2003-12-16
6664153 Method to fabricate a single gate with dual work-functions Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2003-12-16
6653227 Method of cobalt silicidation using an oxide-Titanium interlayer Chung Woh Lai, Beichao Zhang, Arthur Ang, Hai Jiang Peng, Charles Lin 2003-11-25
6632712 Method of fabricating variable length vertical transistors Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2003-10-14
6632745 Method of forming almost L-shaped spacer for improved ILD gap fill Chiew Wah Yap, Zheng Zou, Nguyen Lac, Yelehanka Ramachandramurthy Pradeep, Manni Lal 2003-10-14
6610604 Method of forming small transistor gates by using self-aligned reverse spacer as a hard mask Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2003-08-26
6610575 Forming dual gate oxide thickness on vertical transistors by ion implantation Chew Hoe Ang, Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2003-08-26
6605501 Method of fabricating CMOS device with dual gate electrode Chew Hoe Ang, Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou 2003-08-12
6544848 Method to form an asymmetrical non-volatile memory device using small in-situ doped polysilicon spacers Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2003-04-08
6468851 Method of fabricating CMOS device with dual gate electrode Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more 2002-10-22
6429109 Method to form high k dielectric and silicide to reduce poly depletion by using a sacrificial metal between oxide and gate Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou, Daniel Yen, Chew Hoe Ang +1 more 2002-08-06
6383922 Thermal stability improvement of CoSi2 film by stuffing in titanium Bei Chao Zhang, Chung Woh Lai, Mei Sheng Zhou, Peter Chew, Arthur Ang 2002-05-07
6350661 Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts Chong Wee Lim, Soh Yun Siah, Kong Hean Lee, Chun Hui Low 2002-02-26
6297126 Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts Chong Wee Lim, Soh Yun Siah, Kong Hean Lee, Chun Hui Low 2001-10-02
6271133 Optimized Co/Ti-salicide scheme for shallow junction deep sub-micron device fabrication Chong Wee Lim, Kin Leong Pey, Soh Yun Siah, Chun Hui Low 2001-08-07
6265302 Partially recessed shallow trench isolation method for fabricating borderless contacts Chong Wee Lim, Soh Yun Siah, Kong Hean Lee, Chun Hui Low 2001-07-24
6228727 Method to form shallow trench isolations with rounded corners and reduced trench oxide recess Chong Wee Lim, Soh Yun Siah, Kong Hean Lee, Chun Hui Low 2001-05-08
6165871 Method of making low-leakage architecture for sub-0.18 .mu.m salicided CMOS device Chong Wee Lim, Soh Yun Siah, Kong Hean Lee, Pei Ching Lee 2000-12-26