Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501976 | Substrate processing method and substrate processing apparatus | Seiichi Watanabe, Kazuki Narishige, Xinhe Jerry Lim, Jianfeng Xu, Yi Hao Ng +10 more | 2022-11-15 |
| 10566441 | Methods of forming integrated circuits with solutions to interlayer dielectric void formation between gate structures | Hao Nong, Liang Li, Ting Huo, Yung Fu Chong, Yun Ling Tan | 2020-02-18 |
| 8283263 | Integrated circuit system including nitride layer technology | Sripad Sheshagiri Nagarad, Hwa Weng Koh, Dong Kyun Sohn, Xiaoyu Chen, Louis Lim +3 more | 2012-10-09 |
| 6632745 | Method of forming almost L-shaped spacer for improved ILD gap fill | Zheng Zou, Eng Hua Lim, Nguyen Lac, Yelehanka Ramachandramurthy Pradeep, Manni Lal | 2003-10-14 |
| 6521539 | Selective etch method for selectively etching a multi-layer stack layer | Mei Sheng Zhou, Xue Chun Dai | 2003-02-18 |
| 6294480 | Method for forming an L-shaped spacer with a disposable organic top coating | Yelehanka Ramachandramurthy Pradeep, Jie Yu, Minghui Fan | 2001-09-25 |