Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6877517 | Plasma etch method for forming plasma etched silicon layer | Kwok Keung Paul Ho | 2005-04-12 |
| 6521539 | Selective etch method for selectively etching a multi-layer stack layer | Mei Sheng Zhou, Chiew Wah Yap | 2003-02-18 |