Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8724086 | Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation | Markus Deguenther, Michael Patra, Johannes Wangler, Manfred Maul, Damian Fiolka +1 more | 2014-05-13 |
| 8705005 | Microlithographic illumination system | Markus Deguenther, Michael Gerhard, Bruno Thome, Wolfgang Singer | 2014-04-22 |
| 8537335 | Illumination system for a microlithography projection exposure apparatus, microlithography projection exposure apparatus comprising such an illumination system, and fourier optical system | Markus Schwab, Markus Deguenther, Artur Hoegele | 2013-09-17 |
| 8520307 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2013-08-27 |
| 8467031 | Illumination system for illuminating a mask in a microlithographic exposure apparatus | Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra, Markus Deguenther | 2013-06-18 |
| 8395756 | Illumination system for a microlithographic projection exposure apparatus | Johannes Wangler, Heiko Siekmann, Kenneth Weible, Ralf Scharnweber, Manfred Maul +4 more | 2013-03-12 |
| 8339577 | Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus | Stefan Xalter, Yim-Bun Patrick Kwan, Andras G. Major, Manfred Maul, Johannes Eisenmenger +6 more | 2012-12-25 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2011-02-01 |