Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733395 | Microlithographic projection exposure apparatus | Vladimir Kamenov, Daniel Kraehmer, Toralf Gruner, Karl-Stefan Weissenrieder, Heiko Feldmann +3 more | 2017-08-15 |
| 9341953 | Microlithographic illumination system | Markus Deguenther, Michael Layh, Michael Gerhard, Wolfgang Singer | 2016-05-17 |
| 8705005 | Microlithographic illumination system | Markus Deguenther, Michael Layh, Michael Gerhard, Wolfgang Singer | 2014-04-22 |