Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607334 | Method and apparatus for image analysis | Markus Gerardus Martinus Maria Van Kraaij, Maxim PISARENCO, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2020-03-31 |
| 10539882 | Methods and apparatus for obtaining diagnostic information, methods and apparatus for controlling an industrial process | Alexander Ypma, Adrianus Cornelis Matheus Koopman | 2020-01-21 |
| 10437157 | Method and apparatus for image analysis | Markus Gerardus Martinus Maria Van Kraaij, Adrianus Cornelis Matheus Koopman, Stefan Hunsche, Willem Marie Julia Marcel Coene | 2019-10-08 |
| 10331041 | Metrology method and apparatus, lithographic system and device manufacturing method | Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2019-06-25 |
| 10295913 | Inspection method and apparatus, and corresponding lithographic apparatus | Rene A. M. Pluijms, Martyn John Coogans, Marc Johannes Noot | 2019-05-21 |
| 10274834 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2019-04-30 |
| 10265040 | Method and apparatus for adaptive computer-aided diagnosis | Henricus Wilhelm van der Heijden | 2019-04-23 |
| 10130323 | Method and apparatus for planning computer-aided diagnosis | Henricus Wilhelm van der Heijden | 2018-11-20 |
| 10126662 | Metrology method and apparatus, lithographic system and device manufacturing method | Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2018-11-13 |
| 9946165 | Methods and apparatus for obtaining diagnostic information relating to an industrial process | Alexander Ypma, Jasper Menger, David Deckers, David Han, Adrianus Cornelis Matheus Koopman +3 more | 2018-04-17 |
| 9910366 | Metrology method and apparatus, lithographic system and device manufacturing method | Niels Geypen, Hendrik Jan Hidde Smilde, Alexander Straaijer, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij | 2018-03-06 |
| 9632430 | Lithographic system, lithographic method and device manufacturing method | Everhardus Cornelis Mos, Maurits Van Der Schaar | 2017-04-25 |
| 9470986 | Inspection methods, inspection apparatuses, and lithographic apparatuses | Andreas Fuchs, Maurits Van Der Schaar, Panagiotis Pieter Bintevinos | 2016-10-18 |
| 8947642 | Method and apparatus for estimating model parameters of and controlling a lithographic apparatus by measuring a substrate property and using a polynomial model | — | 2015-02-03 |
| 8947630 | Lithographic apparatus and device manufacturing method | Alexander Padiy, Boris Menchtchikov | 2015-02-03 |
| 8749786 | Inspection method and apparatus, and corresponding lithographic apparatus | Andreas Fuchs, Maurits Van Der Schaar, Panagiotis Pieter Bintevinos | 2014-06-10 |
| 8724087 | Inspection apparatus for lithography | Marcus Adrianus Van De Kerkhof, Antoine Gaston Marie Kiers, Maurits Van Der Schaar, Leonardus Henricus Marie Verstappen, Andreas Fuchs | 2014-05-13 |
| 8706442 | Alignment system, lithographic system and method | Everhardus Cornelis Mos, Henricus Johannes Lambertus Megens, Maurits Van Der Schaar, Hubertus Johannes Gertrudus Simons | 2014-04-22 |
| 8612045 | Optimization method and a lithographic cell | Everhardus Cornelis Mos, Mircea Dusa, Jozef Maria Finders, Christianus Gerardus Maria De Mol, Dongzi Wangli | 2013-12-17 |
| 8504333 | Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method | Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons | 2013-08-06 |
| 7502715 | Observability in metrology measurements | — | 2009-03-10 |
| 7089164 | Control of overlay registration | — | 2006-08-08 |