Issued Patents All Time
Showing 76–91 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7550379 | Alignment mark, use of a hard mask material, and method | Everhardus Cornelis Mos | 2009-06-23 |
| 7486408 | Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Everhardus Cornelis Mos | 2009-02-03 |
| 7476490 | Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method | Maurits Van Der Schaar, Jacobus Burghoorn, Everhardus Cornelis Mos, Rene Monshouwer | 2009-01-13 |
| 7466413 | Marker structure, mask pattern, alignment method and lithographic method and apparatus | Jozef Maria Finders, Mircea Dusa, Luis Alberto Colina Santamaria Colina, Eric Henri Jan Hendrickx, Geert Vandenberghe +1 more | 2008-12-16 |
| 7462548 | Substrate provided with an alignment mark in a substantially transmissive process layer, mask for exposing said mark, device manufacturing method, and device manufactured thereby | — | 2008-12-09 |
| 7460231 | Alignment tool for a lithographic apparatus | Sami Musa, Maurits Van Der Schaar | 2008-12-02 |
| 7453161 | Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus | Sanjaysingh Lalbahadoersing, Henry Megens | 2008-11-18 |
| 7439531 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2008-10-21 |
| 7332732 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2008-02-19 |
| 7329888 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2008-02-12 |
| 7330261 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Paul Christiaan Hinnen, Sanjay Lalbahadoersing, Henry Megens, Maurits Van Der Schaar | 2008-02-12 |
| 7297971 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2007-11-20 |
| 7271073 | Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus | Sanjaysingh Lalbahadoersing, Henry Megens | 2007-09-18 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Antoine Gaston Marie Kiers +7 more | 2006-09-26 |
| 7056805 | Substrate provided with an alignment mark in a substantially transmissive process layer, mask for exposing said mark, device manufacturing method, and device manufactured thereby | — | 2006-06-06 |
| 6858948 | Substrate provided with an alignment mark in a substantially transmissive process layer, mask for exposing said mark, device manufacturing method, and device manufactured thereby | — | 2005-02-22 |