Issued Patents All Time
Showing 26–50 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7706057 | Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2010-04-27 |
| 7701554 | Lithographic apparatus, device manufacturing method, and optical component | — | 2010-04-20 |
| 7692169 | Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus | Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen | 2010-04-06 |
| 7671973 | Optical analysis system using multivariate optical elements | Michael Cornelis Van Beek, Frank Jeroen Pieter Schuurmans | 2010-03-02 |
| 7646869 | System for copy protection of an information carrier | Ralph Kurt, Robert Hendriks | 2010-01-12 |
| 7639422 | Device for generating an array of light spots | — | 2009-12-29 |
| 7630060 | Device manufacturing method, lithographic apparatus and device manufactured thereby | Joost Jeroen Ottens, Wilhelmus Josephus Box, Jan Van Elp, Frank Jeroen Pieter Schuurmans, Jan Evert Van Der Werf | 2009-12-08 |
| 7592610 | Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby | Frank Jeroen Pieter Schuurmans | 2009-09-22 |
| 7508487 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen, Willem Van Schaik, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2009-03-24 |
| 7485881 | Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system | Arnoud Cornelis Wassink, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans | 2009-02-03 |
| 7468521 | Lithographic apparatus and device manufacturing method | Derk Jan Wilfred Klunder, Vadim Yevgenyevich Banine, Frank Jeroen Pieter Schuurmans, Dominik Marcel Vaudrevange, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-23 |
| 7463413 | Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2008-12-09 |
| 7414251 | Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system | — | 2008-08-19 |
| 7405804 | Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby | — | 2008-07-29 |
| 7405825 | Optical analysis system | Frank Jeroen Pieter Schuurmans, Michael Cornelis Van Beek, Wouter Harry Jacinth Rensen, Bernardus Hendrikus Wilhelmus Hendriks, Robert Hendriks +1 more | 2008-07-29 |
| 7382436 | Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2008-06-03 |
| 7352434 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +12 more | 2008-04-01 |
| 7336416 | Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder | 2008-02-26 |
| 7315346 | Lithographic apparatus and device manufacturing method | Michael Cornelis Van Beek, Theodorus Hubertus Josephus Bisschops, Jeroen Jonkers, Mark Kroon, Robertus Adrianus Maria Wolters +1 more | 2008-01-01 |
| 7309869 | Lithographic apparatus, device manufacturing method and radiation system | Ralph Kurt, Frank Jeroen Pieter Schuurmans, Jan Evert Van Der Werf | 2007-12-18 |
| 7307263 | Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap | Vadim Yevgenyevich Banine, Cornelis Petrus Luijkx, Frank Jeroen Pieter Schuurmans | 2007-12-11 |
| 7279690 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Bastiaan Mertens, Johannes Hubertus Josephina Moors +4 more | 2007-10-09 |
| 7256407 | Lithographic projection apparatus and reflector assembly for use therein | Frank Jeroen Pieter Schuurmans | 2007-08-14 |
| 7251012 | Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Johannes Hubertus Josephina Moors, Givi Georgievitch Zukavishvili, Abraham Veefkind | 2007-07-31 |
| 7247866 | Contamination barrier with expandable lamellas | Marcel Mathijs Theodore Marie Dierichs, Johannes Maria Freriks, Frank Jeroen Pieter Schuurmans, Jakob Vijfvinkel, Wilhelmus Josephus Box | 2007-07-24 |