Issued Patents All Time
Showing 51–75 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7235801 | Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby | — | 2007-06-26 |
| 7233009 | Lithographic projection apparatus and reflector assembly for use therein | Frank Jeroen Pieter Schuurmans | 2007-06-19 |
| 7211810 | Method for the protection of an optical element, lithographic apparatus, and device manufacturing method | Frank Jeroen Pieter Schuurmans | 2007-05-01 |
| 7196343 | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby | Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder | 2007-03-27 |
| 7193229 | Lithographic apparatus, illumination system and method for mitigating debris particles | Vadim Yevgenyevich Banine, Aleksey Yurievich Kolesnychenko, Johannes Hubertus Josephina Moors, Frank Jeroen Pieter Schuurmans | 2007-03-20 |
| 7170586 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Jeroen Jonkers, Erik Roelof Loopstra | 2007-01-30 |
| 7161653 | Lithographic apparatus having a contaminant trapping system, a contamination trapping system, a device manufacturing method, and a method for improving trapping of contaminants in a lithographic apparatus | Vadim Yevgenyevich Banine, Arnoud Cornelis Wassink | 2007-01-09 |
| 7145132 | Lithographic apparatus, illumination system and debris trapping system | Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen | 2006-12-05 |
| 7136141 | Lithographic apparatus with debris suppression, and device manufacturing method | — | 2006-11-14 |
| 7116394 | Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system | Ralph Kurt, Bastiaan Mertens, Markus Weiss, Johann Trenkler, Wolfgang Singer | 2006-10-03 |
| 7105837 | Lithographic apparatus, device manufacturing method and radiation system | Ralph Kurt, Frank Jeroen Pieter Schuurmans, Jan Evert Van Der Werf | 2006-09-12 |
| 7106832 | Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source | Derk Jan Wilfred Klunder, Vadim Yevgenyevich Banine, Maarten Marinus Johannes Wilhelmus Van Herpen | 2006-09-12 |
| 7088424 | Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method | Jeroen Jonkers, Frank Jeroen Pieter Schuurmans, Hugo Matthieu Visser | 2006-08-08 |
| 7061574 | Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby | Vadim Yevgenyevich Banine, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vladimir Mihailovitch Krivtsun | 2006-06-13 |
| 7057190 | Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby | Frank Jeroen Pieter Schuurmans, Vadim Yevgenyevich Banine | 2006-06-06 |
| 7034308 | Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby | Vadim Yevgenyevich Banine, Ralph Kurt, Frank Jeroen Pieter Schuurmans, Yurii Victorovitch Sidelnikov | 2006-04-25 |
| 7034923 | Optical element, lithographic apparatus comprising such optical element and device manufacturing method | — | 2006-04-25 |
| 7030963 | Lithographic apparatus and device manufacturing method | Vadim Yevgenyevich Banine, Jeroen Jonkers, Erik Roelof Loopstra | 2006-04-18 |
| 6987275 | Lithographic apparatus and device manufacturing method | Jeroen Jonkers, Antonius Johannes Josephus Van Dijsseldonk, Marcel Mathijs Theodore Marie Dierichs | 2006-01-17 |
| 6947118 | Lithographic apparatus and method of manufacturing a device | — | 2005-09-20 |
| 6930760 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Van Elp, Martinus Hendrikus Antonius Leenders, Vadim Yevgenyevich Banine, Hugo Matthieu Visser | 2005-08-16 |
| 6906788 | Lithographic projection apparatus with multiple suppression meshes | Frank Jeroen Pieter Schuurmans | 2005-06-14 |
| 6859259 | Lithographic projection apparatus and reflector assembly for use therein | Jeroen Jonkers, Frank Jeroen Pieter Schuurmans, Hugo Matthieu Visser | 2005-02-22 |
| 6838684 | Lithographic projection apparatus and particle barrier for use therein | Frank Jeroen Pieter Schuurmans, Vadim Yevgenyevich Banine | 2005-01-04 |
| 6791665 | Lithographic projection apparatus and device manufacturing method | Ralph Kurt, Frank Jeroen Pieter Schuurmans | 2004-09-14 |