| 8344341 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Hubertus Mulkens +2 more |
2013-01-01 |
| 8208120 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +8 more |
2012-06-26 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +16 more |
2012-04-10 |
| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2011-07-19 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2011-05-03 |
| 7931844 |
Imprint lithography |
— |
2011-04-26 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2011-04-26 |
| 7808613 |
Individual wafer history storage for overlay corrections |
— |
2010-10-05 |
| 7795603 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Catharinus Hubertus Mulkens +2 more |
2010-09-14 |
| 7738074 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Antonius Theodorus Anna Maria Derksen, Klaus Simon, Alexander Straaijer |
2010-06-15 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2009-09-22 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2009-09-22 |
| 7482611 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Catharinus Hubertus Mulkens +2 more |
2009-01-27 |
| 7442029 |
Imprint lithography |
— |
2008-10-28 |
| 7420676 |
Alignment method, method of measuring front to backside alignment error, method of detecting non-orthogonality, method of calibration, and lithographic apparatus |
Fransiscus Godefridus Casper Bijnen, Henricus Wilhelmus Maria Van Buel, Gerardus Johannes Joseph Keijsers, Robertus Victorius Maria Scheepens |
2008-09-02 |
| 7388648 |
Lithographic projection apparatus |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2008-06-17 |
| 7375795 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jeroen Fluit, Bernardus Antonius Johannes Luttikhuis, Peter Spit |
2008-05-20 |
| 7372541 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +8 more |
2008-05-13 |
| 7359030 |
Lithographic apparatus and device manufacturing method |
Klaus Simon, Arthur Winfried Eduardus Minnaert, Erik Marie Jose Smeets |
2008-04-15 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7292339 |
Alignment method and apparatus, lithographic apparatus, device manufacturing method, and alignment tool |
— |
2007-11-06 |
| 7274029 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit |
2007-09-25 |
| 7253881 |
Methods and systems for lithographic gray scaling |
Pieter Willem Herman De Jager, Joannes Theodor De Smit |
2007-08-07 |
| 7239393 |
Calibration method for a lithographic apparatus and device manufacturing method |
Arno Jan Bleeker, Henricus Wilhelmus Maria Van Buel |
2007-07-03 |
| 7233384 |
Lithographic apparatus and device manufacturing method, and device manufactured thereby for calibrating an imaging system with a sensor |
Willem Jurrianus Venema, Anastasius Jacobus Anicetus Bruinsma, Eduardus Johannes Gerardus Boon |
2007-06-19 |