| 9383655 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Antonius Theodorus Anna Maria Derksen, Klaus Simon, Alexander Straaijer |
2016-07-05 |
| 9366972 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2016-06-14 |
| 9360765 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2016-06-07 |
| 9329500 |
Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor |
Frank Staals, Erik Roelof Loopstra, Wim Tjibbo Tel, Bearrach Moest |
2016-05-03 |
| 9269531 |
Backscatter reduction in thin electron detectors |
Michael Alwin William Stekelenburg, Gerrit Cornelis van Hoften, Richard Henderson, Gregory James McMullan, Abdul Raffey Faruqi +3 more |
2016-02-23 |
| 9195153 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman, Johannes Catharinus Hubertus Mulkens +2 more |
2015-11-24 |
| 9152058 |
Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more |
2015-10-06 |
| 9097987 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2015-08-04 |
| 9091940 |
Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2015-07-28 |
| 9081299 |
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more |
2015-07-14 |
| 9057967 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Hendricus Johannes Maria Meijer +9 more |
2015-06-16 |
| 8975599 |
Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus |
Frank Staals, Erik Roelof Loopstra, Wim Tjibbo Tel, Bearrach Moest |
2015-03-10 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2015-02-24 |
| 8913223 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Antonius Theodorus Anna Maria Derksen, Klaus Simon, Alexander Straaijer |
2014-12-16 |
| 8823920 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Antonius Theodorus Anna Maria Derksen, Klaus Simon, Alexander Straaijer |
2014-09-02 |
| 8797503 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2014-08-05 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8711323 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Antonius Theodorus Anna Maria Derksen, Klaus Simon, Alexander Straaijer |
2014-04-29 |
| 8618498 |
Backscatter reduction in thin electron detectors |
Gerrit Cornelis van Hoften, Michael Alwin William Stekelenburg, Richard Henderson, Gregory James McMullan, Abdul Raffey Faruqi +3 more |
2013-12-31 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2013-10-15 |
| 8492715 |
Method of protecting a radiation detector in a charged particle instrument |
Maximus Theodorus Otten, Gerrit Cornelis van Hoften |
2013-07-23 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers, Klaus Simon +16 more |
2013-07-09 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2013-06-25 |
| 8446568 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2013-05-21 |