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Lithographic apparatus and device manufacturing method |
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2007-05-29 |
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Lithographic apparatus and device manufacturing method |
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2007-05-08 |
| 7197828 |
Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement |
Jeroen Hendrik Gerardus Christiaan Rutten |
2007-04-03 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko +12 more |
2007-04-03 |
| 7193231 |
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby |
Fransiscus Godefridus Casper Bijnen, Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui |
2007-03-20 |
| 7193232 |
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid |
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2007-03-20 |
| 7116404 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit |
2006-10-03 |
| 7113258 |
Lithographic apparatus |
Henricus Wilhelmus Maria Van Buel, Keith Frank Best, Joseph Consolini, Edwin Ross Shafer |
2006-09-26 |
| 7110081 |
Lithographic apparatus and device manufacturing method |
Christian Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Antonius Theodorus Anna Maria Derksen +4 more |
2006-09-19 |
| 7081943 |
Lithographic apparatus and device manufacturing method |
Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman |
2006-07-25 |
| 7075616 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more |
2006-07-11 |
| 7057702 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Jeroen Johannes Sophia Maria Mertens, Antonius Johannes Van Der Net, Ronald Van Der Ham, Nicolas Lallemant +1 more |
2006-06-06 |
| 7038760 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Antonius Theodorus Anna Maria Derksen, Klaus Simon, Alexander Straaijer, Bob Streefkerk |
2006-05-02 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more |
2005-10-04 |
| 6936385 |
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods |
Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui, Fransiscus Godefridus Casper Bijnen |
2005-08-30 |
| 6822730 |
Substrate holder and device manufacturing method |
Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Arthur Winfried Eduardus Minnaert, Maurice Anton Jaques Teuwen |
2004-11-23 |