Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972267 | Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor | Wei Cao, Hua Chung, Ling Chen | 2005-12-06 |
| 6955211 | Method and apparatus for gas temperature control in a semiconductor processing system | Ling Chen, Dien-Yeh Wu, Alan Ouye, Irena H. Wysok | 2005-10-18 |
| 6939801 | Selective deposition of a barrier layer on a dielectric material | Hua Chung, Ling Chen, Michael Yang, Gongda Yao | 2005-09-06 |
| 6916398 | Gas delivery apparatus and method for atomic layer deposition | Ling Chen, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima | 2005-07-12 |
| 6905541 | Method and apparatus of generating PDMAT precursor | Ling Chen, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more | 2005-06-14 |
| 6838125 | Method of film deposition using activated precursor gases | Hua Chung, Ling Chen | 2005-01-04 |
| 6772072 | Method and apparatus for monitoring solid precursor delivery | Seshadri Ganguli, Hua Chung, Ling Chen | 2004-08-03 |
| 6527865 | Temperature controlled gas feedthrough | Talex Sajoto, Charles Dornfest, Leonid Selyutin, Jun Zhao, Xiao Liang Jin | 2003-03-04 |
| 6302965 | Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces | Salvador P. Umotoy, Xiaoxiong Yuan, Lawrence Chung-Lai Lei | 2001-10-16 |
| 6299692 | Head for vaporizing and flowing various precursor materials onto semiconductor wafers during chemical vapor deposition | Ming Xi, Xiaoxiong Yuan, Anzhong Chang, Anh N. Nguyen | 2001-10-09 |
| 6258170 | Vaporization and deposition apparatus | Sasson Somekh, Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin +3 more | 2001-07-10 |
| 6096134 | Liquid delivery system | Jun Zhao, Charles Dornfest, Frank Chang, Visweswaren Sivaramakrishnan | 2000-08-01 |
| 6082714 | Vaporization apparatus and process | Charles Dornfest, Jun Zhao, Po Tang, Talex Sajoto, Frank Chang | 2000-07-04 |
| 6066209 | Cold trap | Talex Sajoto, Jun Zhao, Charles Dornfest | 2000-05-23 |
| 6063199 | Temperature controlled liner | Talex Sajoto, Leonid Selyutin, Jun Zhao, Charles Dornfest | 2000-05-16 |