Issued Patents All Time
Showing 51–75 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10449602 | Magnesium alloy cast-rolling unit | Lifeng Ma, Jingfeng ZOU, Xiao HU, Guangming Liu, Zhiquan Huang +2 more | 2019-10-22 |
| 10431440 | Methods and apparatus for processing a substrate | Anantha K. Subramani, Chi Hong Ching, Xianmin Tang | 2019-10-01 |
| 10255935 | Magnetic tunnel junctions suitable for high temperature thermal processing | Lin Xue, Chi Hong Ching, Jaesoo Ahn, Mahendra Pakala | 2019-04-09 |
| 10236412 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Daniel Lee Diehl, Vivek Agrawal, Anantha K. Subramani | 2019-03-19 |
| 10193014 | Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandla, Daniel Lee Diehl, Vivek Agrawal, Anantha K. Subramani | 2019-01-29 |
| 10109481 | Aluminum-nitride buffer and active layers by physical vapor deposition | Mingwei Zhu, Nag B. Patibandla, Vivek Agrawal, Anantha K. Subramani, Daniel Lee Diehl +1 more | 2018-10-23 |
| 10096725 | Method for graded anti-reflective coatings by physical vapor deposition | Yong Cao, Daniel Lee Diehl, Xianmin Tang, TAI-CHOU PAPO CHEN, Tingjun Xu | 2018-10-09 |
| 10096455 | Extended dark space shield | Thanh X. Nguyen, Muhammad M. Rasheed, Xianmin Tang | 2018-10-09 |
| 10060024 | Sputtering target for PVD chamber | Zhendong Liu, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung, Muhammad M. Rasheed | 2018-08-28 |
| 9929310 | Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices | Mingwei Zhu, Nag B. Patibandia, Daniel Lee Diehl, Vivek Agrawal, Anantha K. Subramani | 2018-03-27 |
| 9834840 | Process kit shield for improved particle reduction | Muhammad M. Rasheed, Zhendong Liu, Xinyu Fu, Xianmin Tang | 2017-12-05 |
| 9752228 | Sputtering target for PVD chamber | Zhendong Liu, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung, Muhammad M. Rasheed | 2017-09-05 |
| 9689070 | Deposition ring and electrostatic chuck for physical vapor deposition chamber | Muhammad M. Rasheed, Keith A. Miller | 2017-06-27 |
| 9633839 | Methods for depositing dielectric films via physical vapor deposition processes | Weimin Zeng, Thanh X. Nguyen, Yana Cheng, Yong Cao, Daniel Lee Diehl +2 more | 2017-04-25 |
| 9396933 | PVD buffer layers for LED fabrication | Mingwei Zhu, Nag B. Patibandia, Xianmin Tang, Vivek Agrawal, Cheng-Hsiung Tsai +5 more | 2016-07-19 |
| 9281167 | Variable radius dual magnetron | Thanh X. Nguyen, Muhammad M. Rasheed, Xianmin Tang | 2016-03-08 |
| 9087679 | Uniformity tuning capable ESC grounding kit for RF PVD chamber | Muhammad M. Rasheed, Thanh X. Nguyen, Alan A. Ritchie | 2015-07-21 |
| 9017533 | Apparatus for controlling radial distribution of plasma ion density and ion energy at a workpiece surface by multi-frequency RF impedance tuning | John C. Forster, Daniel J. Hoffman, John Pipitone, Xianmin Tang | 2015-04-28 |
| 8992741 | Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target | Xianmin Tang, Zhendong Liu, Tza-Jing Gung, Maurice E. Ewert | 2015-03-31 |
| 8968537 | PVD sputtering target with a protected backing plate | Muhammad M. Rasheed | 2015-03-03 |
| 8920611 | Method for controlling radial distribution of plasma ion density and ion energy at a workpiece surface by multi-frequency RF impedance tuning | John C. Forster, Daniel J. Hoffman, John Pipitone, Xianming Tang | 2014-12-30 |
| 8911601 | Deposition ring and electrostatic chuck for physical vapor deposition chamber | Muhammad M. Rasheed, Keith A. Miller | 2014-12-16 |
| 8580094 | Magnetron design for RF/DC physical vapor deposition | Sally S. Lou, Muhammad M. Rasheed, Jianxin Lei, Xianmin Tang, Srinivas Gandikota +4 more | 2013-11-12 |
| 8557094 | Sputtering chamber having auxiliary backside magnet to improve etch uniformity and magnetron producing sustained self sputtering of ruthenium and tantalum | Xianmin Tang, Hua Chung, Tza-Jing Gung, Praburam Gopalraja, Jick Yu +1 more | 2013-10-15 |
| 8435392 | Encapsulated sputtering target | Lara Hawrylchak, Xianmin Tang, Vijay Parhke | 2013-05-07 |