Issued Patents All Time
Showing 26–50 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8215262 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-07-10 |
| 8181596 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-05-22 |
| 8146530 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2012-04-03 |
| 7925377 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2011-04-12 |
| 7831135 | Method and system for controlling bake plate temperature in a semiconductor processing chamber | — | 2010-11-09 |
| 7743728 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-06-29 |
| 7694647 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2010-04-13 |
| 7567885 | Method and system for determining object height | Kim Vellore, Erica Porras | 2009-07-28 |
| 7521915 | Wafer bevel particle detection | Christopher Laurent Beaudry | 2009-04-21 |
| 7517469 | Method and system to measure flow velocity and volume | Erica Porras, Tetsuya Ishikawa | 2009-04-14 |
| 7500781 | Method and apparatus for detecting substrate temperature in a track lithography tool | — | 2009-03-10 |
| 7497026 | Method and system for detection of wafer centering in a track lithography tool | Lily Pang, Erica Porras | 2009-03-03 |
| 7371022 | Developer endpoint detection in a track lithography system | — | 2008-05-13 |
| 7357842 | Cluster tool architecture for processing a substrate | Tetsuya Ishikawa, Rick J. Roberts, Helen R. Armer, Leon Volfovski, Jay D. Pinson, II +10 more | 2008-04-15 |
| 7285195 | Electric field reducing thrust plate | Dmitry Lubomirsky, Bo Zheng, Lily Pang | 2007-10-23 |
| 7138039 | Liquid isolation of contact rings | Vincent E. Burkhart, Joseph Yahalom | 2006-11-21 |
| 7087144 | Contact ring with embedded flexible contacts | — | 2006-08-08 |
| 7067045 | Method and apparatus for sealing electrical contacts during an electrochemical deposition process | Arthur Keigler, Vincent E. Burkhart, Son Trinh | 2006-06-27 |
| 7025862 | Plating uniformity control by contact ring shaping | Henan Hao, Celina M. Esteban, Timothy Webb, Son Trinh | 2006-04-11 |
| 6875331 | Anode isolation by diffusion differentials | — | 2005-04-05 |
| 6869516 | Method for removing electrolyte from electrical contacts and wafer touching areas | Dmitry Lubomirsky, Michael Yang, Girish Dixit, Vincent E. Burkhart, Allen L. D'Ambra +1 more | 2005-03-22 |
| 6855235 | Anode impedance control through electrolyte flow control | Craig Brodeur, Quinwei Wu, Peter Kimball, Vincent E. Burkhart | 2005-02-15 |
| 6843897 | Anode slime reduction method while maintaining low current | Vincent E. Burkhart | 2005-01-18 |
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, James S. Papanu, Mark Kawaguchi, Jeng H. Hwang, Guangxiang Jin +1 more | 2004-02-17 |
| 6592673 | Apparatus and method for detecting a presence or position of a substrate | Michael Welch | 2003-07-15 |