Issued Patents All Time
Showing 51–70 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6529362 | Monocrystalline ceramic electrostatic chuck | — | 2003-03-04 |
| 6502529 | Chamber having improved gas energizer and method | — | 2003-01-07 |
| 6444040 | Gas distribution plate | David Palagashvili, Dmitry Lubomirsky, Alex Schreiber | 2002-09-03 |
| 6369493 | Microwave plasma applicator having a thermal transfer medium between a plasma containing tube and a cooling jacket | Dmitry Lubomirsky, Simon Yavelberg, David Palagashvili, Donald Olgado | 2002-04-09 |
| 6264852 | Substrate process chamber and processing method | William R. Brown, Ihi Nzeadibe, Dan Kujaneck | 2001-07-24 |
| 6248206 | Apparatus for sidewall profile control during an etch process | Michael Welch, William R. Brown, Walter R. Merry | 2001-06-19 |
| 6159297 | Semiconductor process chamber and processing method | William R. Brown, Ihi Nzeadibe, Dan Kujaneck | 2000-12-12 |
| 6088213 | Bipolar electrostatic chuck and method of making same | — | 2000-07-11 |
| 6072685 | Electrostatic chuck having an electrical connector with housing | — | 2000-06-06 |
| 6062237 | Polymer removal from top surfaces and sidewalls of a semiconductor wafer | William R. Brown, Walter R. Merry, Michael Welch | 2000-05-16 |
| 6015761 | Microwave-activated etching of dielectric layers | Walter R. Merry, William R. Brown, Michael Welch | 2000-01-18 |
| 5948168 | Distributed microwave plasma reactor for semiconductor processing | Hongching Shan, Michael Welch | 1999-09-07 |
| 5870271 | Pressure actuated sealing diaphragm for chucks | — | 1999-02-09 |
| 5819434 | Etch enhancement using an improved gas distribution plate | Walter R. Merry, William R. Brown | 1998-10-13 |
| 5789322 | Low volume gas distribution assembly for a chemical downstream etch tool | William R. Brown, Ihi Nzeadibe, Walter R. Merry | 1998-08-04 |
| 5780359 | Polymer removal from top surfaces and sidewalls of a semiconductor wafer | William R. Brown, Walter R. Merry, Michael Welch | 1998-07-14 |
| 5747917 | Double-walled mircrowave plasma based applicator | — | 1998-05-05 |
| 5737178 | Monocrystalline ceramic coating having integral bonding interconnects for electrostatic chucks | — | 1998-04-07 |
| 5728260 | Low volume gas distribution assembly and method for a chemical downstream etch tool | William R. Brown, Ihi Nzeadibe, Walter R. Merry | 1998-03-17 |
| 5702530 | Distributed microwave plasma reactor for semiconductor processing | Hongching Shan, Michael Welch | 1997-12-30 |